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Patent details

2742167 Title: PROCÉDÉ ET APPAREIL POUR LE DÉPÔT DE COUCHES ATOMIQUES SUR UN SUBSTRAT

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Basic information

Application number:
127485712
WO application number:
NL2012050540
Type:
European patent granted for BE
Status:
Lapsed
Publication number:
2742167
WO publication number:
WO2013022339
1rst applicant's nationality:
Translation language:
EPO publication language:
English
SPC number:

Dates

Filing date:
30/07/2012
Grant date:
17/10/2018
EP publication date:
18/06/2014
WO publication date:
14/02/2013
Claims translation received date:
Translation received date (EP publication B1):
Translation received date (EP publication B2):
Translation received date (EP publication B3):
Registration date:
17/10/2018
EP B1 publication date:
17/10/2018
EP B2 publication date:
EP B3 publication date:
Lapsed date:
31/07/2019
Expiration date (if granted and all annual fees paid):
30/07/2032

Applicant

Name:
Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
Legal Form:
From:
17/10/2018
Address:
Anna van Buerenplein 1, 2595 DA 's-Gravenhage, Netherlands (NL)
To:

Inventor

1

Name:
KNAAPEN, Raymond Jacobus Wilhelmus
Legal Form:
Address:
NL-2628 VK Delft, Netherlands (NL)

2

Name:
OLIESLAGERS, Ruud
Legal Form:
Address:
NL-2628 VK Delft, Netherlands (NL)

3

Name:
VAN DEN BERG, Dennis
Legal Form:
Address:
NL-2628 VK Delft, Netherlands (NL)

4

Name:
VAN DEN BOER, Matijs C.
Legal Form:
Address:
NL-2628 VK Delft, Netherlands (NL)

5

Name:
MAAS, Diederik Jan
Legal Form:
Address:
NL-2628 VK Delft, Netherlands (NL)

6

Name:
VAN DER DONCK, Jacques Cor Johan
Legal Form:
Address:
NL-2628 VK Delft, Netherlands (NL)

7

Name:
ROOZEBOOM, Freddy
Legal Form:
Address:
NL-2628 VK Delft, Netherlands (NL)

Priority

Priority patent number:
11177166
Priority date:
10/08/2011
Priority country:
European Patent Office (EPO) (EP)

Classification

IPC or IDT classification:
C23C 16/44; C23C 16/455; C23C 16/458; C23C 16/52; C23C 16/54;

Publication

Bulletin

1

Bulletin heading:
EP2
Journal edition number:
2018/29
Publication date:
07/12/2018
Description:
Contains data concerning European patents granted and published (B1 publication) for Belgium and for which no translation needed to be filed

2

Bulletin heading:
VRV
Journal edition number:
2020/07
Publication date:
16/04/2020
Description:
Contains data concerning lapse, annulment or rejection of patent(s) (applications) and SPC (applications)

European Patent Bulletin

Issue number:
201842
Publication date:
17/10/2018
Description:
Grant (B1)

Annual fee

Annual fee(s) Due Date:
Annual fee number:
Expected payer:
Last annual fee payment date:
Last annual fee paid number:
Payer:
Filing date Document type Publication Type Document Description Number of pages