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Patent details

2818526 Title: Compositions de pâte de polissage chimique mécanique et procédé d'utilisation de celui-ci pour des applications d'interconnexion et de cuivre

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Basic information

Application number:
141747097
WO application number:
Type:
European patent granted for BE
Status:
Deemed Void
Publication number:
2818526
WO publication number:
1rst applicant's nationality:
Translation language:
EPO publication language:
English
SPC number:

Dates

Filing date:
27/06/2014
Grant date:
22/06/2016
EP publication date:
31/12/2014
WO publication date:
Claims translation received date:
Translation received date (EP publication B1):
Translation received date (EP publication B2):
Translation received date (EP publication B3):
Registration date:
22/06/2016
EP B1 publication date:
22/06/2016
EP B2 publication date:
EP B3 publication date:
Lapsed date:
Expiration date (if granted and all annual fees paid):
27/06/2034

Applicant

Name:
AIR PRODUCTS AND CHEMICALS, INC.
Legal Form:
From:
22/06/2016
Address:
7201 Hamilton Boulevard, Allentown, PA 18195-1501, United States (US)
To:

Inventor

1

Name:
Shi, Xiaobo
Legal Form:
Address:
Chandler, AZ Arizona 85224, United States (US)

2

Name:
Murella, Krishna P.
Legal Form:
Address:
Phoenix, AZ Arizona 85044, United States (US)

3

Name:
Schlueter, James Allen
Legal Form:
Address:
Phoenix, AZ Arizona 85045, United States (US)

4

Name:
Choo, Jae Ouk
Legal Form:
Address:
Chandler, AZ Arizona 85249, United States (US)

Priority

Priority patent number:
201313929346
Priority date:
27/06/2013
Priority country:
United States (US)

Classification

IPC or IDT classification:
C09G 1/02; H01L 21/321; C09K 3/14;

Publication

European Patent Bulletin

Issue number:
201625
Publication date:
22/06/2016
Description:
Grant (B1)

Annual fee

Annual fee(s) Due Date:
02/01/2017
Annual fee number:
3
Annual fee amount:
40 Euro
Penalty fee amount:
85 Euro
Expected payer:
Last annual fee payment date:
Last annual fee paid number:
Payer:
Filing date Document type Document Description Number of pages