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Patent details

1598855 Title: APPAREIL ET PROCEDE D'EXPOSITION, PROCEDE DE PRODUCTION DE L'APPAREIL

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Basic information

Application number:
047149109
WO application number:
JP2004002295
Type:
European patent granted for BE
Status:
Deemed Void
Publication number:
1598855
WO publication number:
WO2004086468
1rst applicant's nationality:
Translation language:
EPO publication language:
English
SPC number:

Dates

Filing date:
26/02/2004
Grant date:
22/04/2015
EP publication date:
23/11/2005
WO publication date:
07/10/2004
Claims translation received date:
Translation received date (EP publication B1):
Translation received date (EP publication B2):
Translation received date (EP publication B3):
Registration date:
22/04/2015
EP B1 publication date:
22/04/2015
EP B2 publication date:
EP B3 publication date:
Lapsed date:
Expiration date (if granted and all annual fees paid):
26/02/2024

Applicant

Name:
Nikon Corporation
Legal Form:
From:
22/04/2015
Address:
12-1, Yurakucho 1-chome Chiyoda-ku, Tokyo 100-8331, Japan (JP)
To:

Inventor

1

Name:
Nagasaka, Hiroyuki
Legal Form:
Address:
Chiyoda-ku, Tokyo 100-8331, Japan (JP)

2

Name:
Owa, Soichi
Legal Form:
Address:
Chiyoda-ku, Tokyo 100-8331, Japan (JP)

3

Name:
Nishii, Yasufumi
Legal Form:
Address:
Chiyoda-ku, Tokyo 100-8331, Japan (JP)

Priority

1

Priority patent number:
2003049365
Priority date:
26/02/2003
Priority country:
Japan (JP)

2

Priority patent number:
2003110748
Priority date:
15/04/2003
Priority country:
Japan (JP)

3

Priority patent number:
2003320100
Priority date:
11/09/2003
Priority country:
Japan (JP)

Classification

IPC or IDT classification:
H01L 21/027; G03F 7/20;

Publication

European Patent Bulletin

Issue number:
201517
Publication date:
22/04/2015
Description:
Grant (B1)

Annual fee

Annual fee(s) Due Date:
31/08/2016
Annual fee number:
13
Annual fee amount:
275 Euro
Penalty fee amount:
230 Euro
Expected payer:
Last annual fee payment date:
Last annual fee paid number:
Payer:
Filing date Document type Publication Type Document Description Number of pages