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Patent details

2287893 Title: OBJECTTAFELAANDRIJVINGSWERKWIJZE EN OBJECTTAFELEENHEID, BELICHTINGSINRICHTING, EN INRICHTINGSVERVAARDIGINGSWERKWIJZE

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Basic information

Application number:
101861409
WO application number:
Type:
European patent granted for BE
Status:
Lapsed
Publication number:
2287893
WO publication number:
1rst applicant's nationality:
Translation language:
Dutch
EPO publication language:
English
SPC number:

Dates

Filing date:
27/01/2005
Grant date:
20/04/2016
EP publication date:
23/02/2011
WO publication date:
Claims translation received date:
Translation received date (EP publication B1):
18/05/2016
Translation received date (EP publication B2):
Translation received date (EP publication B3):
Registration date:
20/04/2016
EP B1 publication date:
20/04/2016
EP B2 publication date:
EP B3 publication date:
Lapsed date:
31/01/2020
Expiration date (if granted and all annual fees paid):
27/01/2025

Applicant

Name:
Nikon Corporation
Legal Form:
From:
20/04/2016
Address:
15-3, Konan 2-chome Minato-ku, Tokyo 108-6290, Japan (JP)
To:

Agent

Name:
BRANTS Johan Philippe Emile
Legal Form:
From:
18/05/2016
Address:
Pauline Van Pottelsberghelaan 24, 9051, GENT, Belgium (BE)
To:

Inventor

Name:
Shibazaki, Yuichi
Legal Form:
Address:
Tokyo 100-8331, Japan (JP)

Priority

1

Priority patent number:
2004025837
Priority date:
02/02/2004
Priority country:
Japan (JP)

2

Priority patent number:
2004300566
Priority date:
14/10/2004
Priority country:
Japan (JP)

Classification

IPC or IDT classification:
G03F 7/20; H01L 21/027;

Publication

Bulletin

1

Bulletin heading:
EP3
Journal edition number:
2016/05
Publication date:
16/09/2019
Description:
Contains data concerning European patents granted for Belgium and published (B1 publication) in English and for which a translation in Dutch, French or German was filed under the Belgian Patent Laws

2

Bulletin heading:
VRV
Journal edition number:
2020/23
Publication date:
15/10/2020
Description:
Contains data concerning lapse, annulment or rejection of patent(s) (applications) and SPC (applications)

European Patent Bulletin

Issue number:
201616
Publication date:
20/04/2016
Description:
Grant (B1)

Annual fee

Annual fee(s) Due Date:
Annual fee number:
Expected payer:
Last annual fee payment date:
17/12/2018
Last annual fee paid number:
15
Last annual fee paid amount:
360 Euro
Payer:
C.P.A.
Filing date Document type Publication Type Document Description Number of pages File Type
18/05/2016 Incoming Correspondence (Email) Cover letter 2 PDF /8/8/8/5/0/0721505888/docs/101861409_0_incomingcorrespondenceelectronic_20160519_082857032.pdf
18/05/2016 Translations 129 PDF /8/8/8/5/0/0721505888/docs/101861409_1_translations_20160519_082852185.pdf
18/05/2016 General Document Other 1 PDF /8/8/8/5/0/0721505888/docs/101861409_2_generaldocument_20160519_082851732.pdf
18/05/2016 Incoming Correspondence (Email) Cover letter 1 PDF /8/8/8/5/0/0721505888/docs/101861409_3_incomingcorrespondenceelectronic_20160519_082850978.pdf