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Patent details

2699966 Title: ARCHITECTURE DE RESEAU ET PROTOCOLE POUR UN CLUSTER DES APPAREILS LITHOGRAPHIQUES

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Basic information

Application number:
127160174
WO application number:
EP2012057366
Type:
European patent granted for BE
Status:
Lapsed
Publication number:
2699966
WO publication number:
WO2012143548
1rst applicant's nationality:
Translation language:
EPO publication language:
English
SPC number:

Dates

Filing date:
23/04/2012
Grant date:
07/04/2021
EP publication date:
26/02/2014
WO publication date:
26/10/2012
Claims translation received date:
Translation received date (EP publication B1):
Translation received date (EP publication B2):
Translation received date (EP publication B3):
Registration date:
07/04/2021
EP B1 publication date:
07/04/2021
EP B2 publication date:
EP B3 publication date:
Lapsed date:
30/04/2021
Expiration date (if granted and all annual fees paid):
23/04/2032

Applicant

Name:
ASML Netherlands B.V.
Legal Form:
From:
07/04/2021
Address:
De Run 6501, 5504 DR Veldhoven, Netherlands (NL)
To:

Inventor

1

Name:
VAN KERVINCK, Marcel Nicolaas Jacobus
Legal Form:
Address:
NL-2595 BV Den Haag, Netherlands (NL)

2

Name:
DE BOER, Guido
Legal Form:
Address:
NL-4143 LN Leerdam, Netherlands (NL)

Priority

1

Priority patent number:
201161533673 P
Priority date:
12/09/2011
Priority country:
United States (US)

2

Priority patent number:
201161478117 P
Priority date:
22/04/2011
Priority country:
United States (US)

Classification

IPC or IDT classification:
G03F 7/20; H01J 37/317;

Publication

Bulletin

1

Bulletin heading:
EP2
Journal edition number:
2021/07
Publication date:
26/05/2021
Description:
Contains data concerning European patents granted and published (B1 publication) for Belgium and for which no translation needed to be filed

2

Bulletin heading:
VRV
Journal edition number:
2021/23
Publication date:
19/01/2022
Description:
Contains data concerning lapse, annulment or rejection of patent(s) (applications) and SPC (applications)

European Patent Bulletin

Issue number:
202114
Publication date:
07/04/2021
Description:
Grant (B1)

Annual fee

Annual fee(s) Due Date:
Annual fee number:
Expected payer:
Last annual fee payment date:
Last annual fee paid number:
Payer:
Filing date Document type Publication Type Document Description Number of pages