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Patent details
2764408
Title:
PORTE-SUBSTRAT, APPAREIL DE LITHOGRAPHIE ET PROCÉDÉ D'UTILISATION D'UN PORTE-SUBSTRAT
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Basic information
Application number:
127664092
WO application number:
EP2012068386
Type:
European patent granted for BE
Status:
Lapsed
Publication number:
2764408
WO publication number:
WO2013050243
1rst applicant's nationality:
Translation language:
EPO publication language:
English
SPC number:
Dates
Filing date:
19/09/2012
Grant date:
21/08/2019
EP publication date:
13/08/2014
WO publication date:
11/04/2013
Claims translation received date:
Translation received date (EP publication B1):
Translation received date (EP publication B2):
Translation received date (EP publication B3):
Registration date:
21/08/2019
EP B1 publication date:
21/08/2019
EP B2 publication date:
EP B3 publication date:
Lapsed date:
30/09/2019
Expiration date (if granted and all annual fees paid):