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Patent details

3899662 Title: PROCÉDÉ DE COMMANDE D'UN PROCESSUS DE FABRICATION ET APPAREILS ASSOCIÉS

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Basic information

Application number:
198010449
WO application number:
EP2019081282
Type:
European patent granted for BE
Status:
Lapsed
Publication number:
3899662
WO publication number:
WO2020126242
1rst applicant's nationality:
Translation language:
EPO publication language:
English
SPC number:

Dates

Filing date:
14/11/2019
Grant date:
01/06/2022
EP publication date:
27/10/2021
WO publication date:
25/06/2020
Claims translation received date:
Translation received date (EP publication B1):
Translation received date (EP publication B2):
Translation received date (EP publication B3):
Registration date:
01/06/2022
EP B1 publication date:
01/06/2022
EP B2 publication date:
EP B3 publication date:
Lapsed date:
30/11/2022
Expiration date (if granted and all annual fees paid):
14/11/2039

Applicant

Name:
ASML Netherlands B.V.
Legal Form:
From:
01/06/2022
Address:
P.O. Box 324, 5500 AH Veldhoven, Netherlands (NL)
To:

Inventor

1

Name:
BRANTJES, Nicolaas Petrus Marcus
Legal Form:
Address:
5500 AH Veldhoven, Netherlands (NL)

2

Name:
COX, Matthijs
Legal Form:
Address:
5500 AH Veldhoven, Netherlands (NL)

3

Name:
MENCHTCHIKOV, Boris
Legal Form:
Address:
San Jose, CA 95131, United States (US)

4

Name:
TABERY, Cyrus, Emil
Legal Form:
Address:
San Jose, CA 95131, United States (US)

5

Name:
ZHANG, Youping
Legal Form:
Address:
San Jose, CA 95131, United States (US)

6

Name:
ZOU, Yi
Legal Form:
Address:
San Jose, CA 95131, United States (US)

7

Name:
LIN, Chenxi
Legal Form:
Address:
San Jose, CA 95131, United States (US)

8

Name:
CHENG, Yana
Legal Form:
Address:
San Jose, CA 95131, United States (US)

9

Name:
HASTINGS, Simon, Philip, Spencer
Legal Form:
Address:
San Jose, CA 95131, United States (US)

10

Name:
GENIN, Maxime, Philippe, Frederic
Legal Form:
Address:
San Jose, CA 95131, United States (US)

Priority

1

Priority patent number:
201962802866 P
Priority date:
08/02/2019
Priority country:
United States (US)

2

Priority patent number:
18214013
Priority date:
19/12/2018
Priority country:
European Patent Office (EPO) (EP)

Classification

IPC or IDT classification:
G03F 7/20; G03F 9/00;

Publication

Bulletin

1

Bulletin heading:
EP2
Journal edition number:
2022/11
Publication date:
23/06/2022
Description:
Contains data concerning European patents granted and published (B1 publication) for Belgium and for which no translation needed to be filed

2

Bulletin heading:
VRV
Journal edition number:
2023/13
Publication date:
27/07/2023
Description:
Contains data concerning lapse, annulment or rejection of patent(s) (applications) and SPC (applications)

European Patent Bulletin

Issue number:
202222
Publication date:
01/06/2022
Description:
Grant (B1)

Annual fee

Annual fee(s) Due Date:
Annual fee number:
Expected payer:
Last annual fee payment date:
Last annual fee paid number:
Payer:
Filing date Document type Publication Type Document Description Number of pages